| Machine learning for predictive maintenance: A multiple classifier approach GA Susto, A Schirru, S Pampuri, S McLoone, A Beghi IEEE transactions on industrial informatics 11 (3), 812-820, 2014 | 838 | 2014 |
| Supervised aggregative feature extraction for big data time series regression GA Susto, A Schirru, S Pampuri, S McLoone IEEE Transactions on Industrial Informatics 12 (3), 1243-1252, 2015 | 75 | 2015 |
| Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach GA Susto, S Pampuri, A Schirru, A Beghi, G De Nicolao Computers & Operations Research 53, 328-337, 2015 | 70 | 2015 |
| A hidden-Gamma model-based filtering and prediction approach for monotonic health factors in manufacturing GA Susto, A Schirru, S Pampuri, A Beghi, G De Nicolao Control Engineering Practice 74, 84-94, 2018 | 46 | 2018 |
| Automatic control and machine learning for semiconductor manufacturing: Review and challenges GA Susto, S Pampuri, A Schirru, G De Nicolao, SF McLoone, A Beghi Proceedings of the 10th European Workshop on Advanced Control and Diagnosis …, 2012 | 40 | 2012 |
| Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing S Pampuri, A Schirru, G Fazio, G De Nicolao Automation Science and Engineering (CASE), 2011 IEEE Conference on, 244-249, 2011 | 38 | 2011 |
| A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation GA Susto, A Schirru, S Pampuri, D Pagano, S McLoone, A Beghi 2013 IEEE international conference on automation science and engineering …, 2013 | 31 | 2013 |
| Particle filtering of hidden Gamma processes for robust Predictive Maintenance in semiconductor manufacturing A Schirru, S Pampuri, G De Nicolao Automation Science and Engineering (CASE), 2010 IEEE Conference on, 51-56, 2010 | 31 | 2010 |
| Prediction of integral type failures in semiconductor manufacturing through classification methods GA Susto, S McLoone, D Pagano, A Schirru, S Pampuri, A Beghi 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation …, 2013 | 30 | 2013 |
| A predictive maintenance system based on regularization methods for ion-implantation GA Susto, A Schirru, S Pampuri, A Beghi 2012 semi advanced semiconductor manufacturing conference, 175-180, 2012 | 28 | 2012 |
| Multilevel Kernel Methods for Virtual Metrology in Semiconductor Manufacturing⋆ A Schirru, S Pampuri, C De Luca, G De Nicolao World Congress 18 (1), 11614-11621, 2011 | 27 | 2011 |
| Learning from time series: Supervised aggregative feature extraction A Schirru, GA Susto, S Pampuri, S McLoone 2012 IEEE 51st IEEE Conference on Decision and Control (CDC), 5254-5259, 2012 | 24 | 2012 |
| Multistep virtual metrology approaches for semiconductor manufacturing processes S Pampuri, A Schirru, GA Susto, C De Luca, A Beghi, G De Nicolao 2012 IEEE International Conference on Automation Science and Engineering …, 2012 | 24 | 2012 |
| An information-theory and virtual metrology-based approach to run-to-run semiconductor manufacturing control GA Susto, A Schirru, S Pampuri, G De Nicolao, A Beghi 2012 IEEE International Conference on Automation Science and Engineering …, 2012 | 20 | 2012 |
| Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing A Schirru, S Pampuri, G De Nicolao Automation Science and Engineering (CASE), 2010 IEEE Conference on, 57-62, 2010 | 16 | 2010 |
| Optimal tuning of epitaxy pyrometers GA Susto, S Pampuri, A Schirru, A Beghi 2012 SEMI Advanced Semiconductor Manufacturing Conference, 294-299, 2012 | 14 | 2012 |
| A fraud detection decision support system via human on-line behavior characterization and machine learning GA Susto, M Terzi, C Masiero, S Pampuri, A Schirru 2018 First International Conference on Artificial Intelligence for …, 2018 | 12 | 2018 |
| Proportional hazard model with ℓ1 Penalization applied to Predictive Maintenance in semiconductor manufacturing S Pampuri, A Schirru, C De Luca, G De Nicolao Automation Science and Engineering (CASE), 2011 IEEE Conference on, 250-255, 2011 | 11 | 2011 |
| MSC-clustering and forward stepwise regression for virtual metrology in highly correlated input spaces P Prakash, A Schirru, P Hung, S McLoone 2012 SEMI Advanced Semiconductor Manufacturing Conference, 45-50, 2012 | 7 | 2012 |
| Efficient Marginal Likelihood Computation for Gaussian Process Regression A Schirru, S Pampuri, G De Nicolao, S McLoone Arxiv preprint arXiv:1110.6546, 2011 | 6 | 2011 |
