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Adrie Mackus
Adrie Mackus
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Jahr
The use of atomic layer deposition in advanced nanopatterning
AJM Mackus, AA Bol, WMM Kessels
Nanoscale 6 (19), 10941-10960, 2014
4022014
From the bottom-up: toward area-selective atomic layer deposition with high selectivity
AJM Mackus, MJM Merkx, WMM Kessels
Chemistry of Materials 31 (1), 2-12, 2018
3422018
Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
AJM Mackus, JR Schneider, C MacIsaac, JG Baker, SF Bent
Chemistry of Materials 31 (4), 1142-1183, 2018
2272018
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
A Mameli, MJM Merkx, B Karasulu, F Roozeboom, WEMM Kessels, ...
ACS nano 11 (9), 9303-9311, 2017
1912017
Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition
MJ Weber, AJM Mackus, MA Verheijen, C van der Marel, WMM Kessels
Chemistry of Materials 24 (15), 2973-2977, 2012
1822012
Remote plasma ALD of platinum and platinum oxide films
HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ...
Electrochemical and Solid-State Letters 12 (7), G34, 2009
1602009
Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ...
Applied Physics Letters 95 (1), 2009
1542009
Influence of oxygen exposure on the nucleation of platinum atomic layer deposition: consequences for film growth, nanopatterning, and nanoparticle synthesis
AJM Mackus, MA Verheijen, N Leick, AA Bol, WMM Kessels
Chemistry of Materials 25 (9), 1905-1911, 2013
1472013
Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum
AJM Mackus, N Leick, L Baker, WMM Kessels
Chemistry of Materials 24 (10), 1752-1761, 2012
1442012
Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
L Baker, AS Cavanagh, D Seghete, SM George, AJM Mackus, ...
Journal of Applied Physics 109 (8), 2011
1282011
Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ...
Journal of Applied Physics 102 (8), 2007
1022007
Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition
AJM Mackus, JJL Mulders, MCM Van De Sanden, WMM Kessels
Journal of Applied Physics 107 (11), 2010
972010
Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
AJM Mackus, SBS Heil, E Langereis, HCM Knoops, MCM Van de Sanden, ...
Journal of Vacuum Science & Technology A 28 (1), 77-87, 2010
902010
Room-temperature atomic layer deposition of platinum
AJM Mackus, D Garcia-Alonso, HCM Knoops, AA Bol, WMM Kessels
Chemistry of Materials 25 (9), 1769-1774, 2013
882013
Nanopatterning by direct-write atomic layer deposition
AJM Mackus, SAF Dielissen, JJL Mulders, WMM Kessels
Nanoscale 4 (15), 4477-4480, 2012
832012
Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition
A Mameli, B Karasulu, MA Verheijen, B Barcones, B Macco, AJM Mackus, ...
Chemistry of Materials 31 (4), 1250-1257, 2019
822019
Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation
A Mameli, Y Kuang, M Aghaee, CK Ande, B Karasulu, M Creatore, ...
Chemistry of Materials 29 (3), 921-925, 2017
802017
Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
MJ Weber, AJM Mackus, MA Verheijen, V Longo, AA Bol, WMM Kessels
The Journal of Physical Chemistry C 118 (16), 8702-8711, 2014
792014
Direct-write atomic layer deposition of high-quality Pt nanostructures: selective growth conditions and seed layer requirements
AJM Mackus, NFW Thissen, JJL Mulders, PHF Trompenaars, ...
The Journal of Physical Chemistry C 117 (20), 10788-10798, 2013
722013
The vibrations of circular plates and their relation to Bessel functions
JR Airey
Proceedings of the Physical Society of London 23 (1), 225, 1910
711910
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